Pilot line for micro-transfer-printing of functional components on wafer level

Project Information

MICROPRINCE

Grant agreement ID: 737465

DOI 10.3030/737465

Project closed

EC signature date 18 May 2017

Start date 1 April 2017

End date 30 September 2020

Funded under

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Total cost € 10 854 745,94

EU contribution € 2 614 618,01

Coordinated by

X-FAB MEMS FOUNDRY GmbH
Germany

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Deliverables

Websites, patent fillings, videos etc. (1)

Internal and external IT communication infrastructure and project website

The external IT communication infrastructure constitutes a guideline for communication of the MICROPRINCE project to external target groups including conferences, marketing measures and communication channels. Furthermore this deliverable constitutes the launch of the internal MICROPRINCE communication infrastructure including the establishment of mailing lists or a subversion server, and the MICROPRINCE website.

Publications

Peer reviewed articles (1)

Transfer-print integration of GaAs p-i-n photodiodes onto silicon nitride waveguides for near-infrared applications

Author(s): Jeroen Goyvaerts, Sulakshna Kumari, Sarah Uvin, Jing Zhang, Roel Baets, Agnieszka Gocalinska, Emanuele Pelucchi, Brian Corbett, Günther Roelkens
Published in: Optics Express, Issue 28/14, 2020, Page(s) 21275, ISSN 1094-4087
Publisher: Optical Society of America
DOI: 10.1364/oe.395796

Conference proceedings (7)

A Graph-Based Model of Micro-Transfer Printing for Cost-Optimized Heterogeneous 2.5D Systems

Author(s): Robert Fischbach, Tilman Horst, Jens Lienig
Published in: 2019 International 3D Systems Integration Conference (3DIC), 2019, Page(s) 1-6, ISBN 978-1-7281-4870-0
Publisher: IEEE
DOI: 10.1109/3DIC48104.2019.9058886

Approaches for wafer level packaging and heterogeneous system integration for CMOS and MEMS sensors

Author(s): S. Dempwolf, L. Hofmann, C. Bowers, D. Guenther, R. Knechtel, S. Schulz, R. Gerbach
Published in: 2017
Publisher: 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
DOI: 10.5281/zenodo.1043259

Approaches for wafer level packaging and heterogeneous system integration for CMOS and MEMS sensors

Author(s): Dempwolf, Sophia; Hofmann, Lutz; Bowers, Christopher; Guenther, Daniela; Knechtel, Roy; Schulz, Stefan E.; Gerbach, Ronny
Published in: Approaches for wafer level packaging and heterogeneous system integration for CMOS and MEMS sensors, Issue 1, 2017
Publisher: 2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)
DOI: 10.5281/zenodo.1043259

Transfer printing for heterogeneous silicon PICs

Author(s): Roelkens, Gunther; Zhang, Jing; Kumari, Sulakshna; Juvert, Joan; Liles, Alexandros; Muliuk, Grigorij; Goyvaerts, Jeroen; Hag, Bahawal; Mahmoud, Nayyera; Van Thourhout, Dries
Published in: Presentation at smart Systems Integration, Issue 1, 2019
Publisher: Zenodo
DOI: 10.5281/zenodo.2678181

Simulation-Based Design Methodology for Heterogeneous Systems at Package-Level Utilizing XML and XSLT

Author(s): Fischbach, Robert; Heinig, Andy; Lienig, Jens
Published in: Fraunhofer EAS, Issue 1, 2017
Publisher: Zenodo
DOI: 10.5281/zenodo.1043277

Micro-Transfer-Printing and Potential Process Optimizations by FEA

Author(s): Buehler, Kjell; Lorenz, Georg; Mittag, Marcel; Krieger, Uwe; Heise, Niclas; Wicht, Sebastian; Gerbach, Ronny; Naumann, Falk
Published in: NTERNATIONAL CONFERENCE ON THERMAL, MECHANICAL AND MULTI-PHYSICS SIMULATION AND EXPERIMENTS IN MICROELECTRONICS AND MICROSYSTEMS (Eurosime 2019), Hannover, Germany, 24 - 27 March 2019, Issue 1, 2019
Publisher: ZENODO
DOI: 10.5281/zenodo.2677535

Micro-transfer-printing for heterogeneous integration

Author(s): B. Corbett, Z. Li, K. Buehler, F. Naumann, U. Krieger, S. Wicht, C. A. Bower
Published in: 2019 6th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D), 2019, Page(s) 34-34, ISBN 978-4-9047-4307-2
Publisher: IEEE
DOI: 10.23919/ltb-3d.2019.8735381

Book chapters (1)

Design Methodologies and Co-Design Options for Novel 3D Technologies

Author(s): Horst, Tilman; Fischbach, Robert; Lienig, Jens
Published in: Issue 6, 2018
Publisher: VDE Verlag
DOI: 10.5281/zenodo.3632449

Other (6)

MICROPRINCE-Open access pilot line for Micro-Transfer-Printing of functional components on wafer level

Author(s): Wicht, Sebastian; Krieger, Uwe; Guenther, Daniela; Heise, Niclas; Krojer, Matthias; Kittler, Gabriel; Naumann, Falk; Altmann, Frank; Gomez, David; Fecioru, Alin
Published in: Issue 1, 2019
Publisher: ZENODO
DOI: 10.5281/zenodo.2654502

MICRO-TRANSFER-PRINTING AND POTENTIAL PROCESS OPTIMIZATIONS BY FEA

Author(s): Buehler, Kjell; Lorenz, Georg; Mittag, Marcel; Krieger, Uwe; Heise, Niclas; Wicht, Sebastian; Gerbach, Ronny; Naumann, Falk
Published in: Issue 1, 2019
Publisher: zenodo
DOI: 10.5281/zenodo.2677551

Micro-Transfer-Printing and its Process Characterization by FEA & Micromechanical Testing

Author(s): Naumann, Falk; Buehler, Kjell; Mittag, Marcel; Lorenz, Georg; Krieger, Uwe; Wicht, Sebastian; Günther, Daniela; Altmann, Frank
Published in: International Conference on Innovation in Failure Analysis and Material Diagnostics of Electronics Components (CAM 2019), Halle, Germany, 10-11 April 2019, Issue 1, 2019
Publisher: Zenodo
DOI: 10.5281/zenodo.2702429

Manufacturing Capability of Micro-Transfer Printing

Author(s): Gomez, David; Moore, Tanya; Meitl, Matthew A.; Bonafede, Salvatore; Pearson, Andrew; Ghosal, Kanchan; Raymond, Brook; Radauscher, Erich; Kneeburg, David; Roe, Julia; Fecioru, Alin; Kelleher, Steven; Trindade, Antonio Jose; Bower, Christopher A.
Published in: Smart Systems Integration (SSI), Barcelona, 10-11 April 2019, Issue 1, 2019
Publisher: Zenodo
DOI: 10.5281/zenodo.2654512

MICROPRINCE—Open Access Foundry Pilot Line for Elastomer Assisted Micro-Assembly

Author(s): Gerbach, Ronny; Ghosal, Kanchan; Krieger, Uwe; Kittler, Gabriel; Bower, Christopher; Knechtel, Roy
Published in: 2017 Materials Research Society Fall Meeting & Exhibit (MRS 2017), Fairfax, Alaska, 29 November 2017, Issue 1, 2019
Publisher: Zenodo
DOI: 10.5281/zenodo.2651911

Assembly-Related Chip/Package Co-Design of Heterogeneous Systems Manufactured by Micro-Transfer Printing

Author(s): Fischbach, Robert; Horst, Tilman; Lienig, Jens
Published in: 2017 Materials Research Society Fall Meeting & Exhibit (MRS 2017), Issue 1, 2019
Publisher: ZENODO
DOI: 10.5281/zenodo.3234391