Metrology for future 3D-technologies

Informazioni relative al progetto

METRO4-3D

ID dell’accordo di sovvenzione: 688225

DOI 10.3030/688225

Progetto chiuso

Data della firma CE 25 Novembre 2015

Data di avvio 1 Febbraio 2016

Data di completamento 31 Gennaio 2019

Finanziato da

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Costo totale € 3 349 813,75

Contributo UE € 2 689 035,00

Coordinato da

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

Risultati finali

Documents, reports (5)

Report on organized training on the instrument
Report on dissemination activities
Summary of the access time on the instruments
Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Websites, patent fillings, videos etc. (1)

Set-up of the website and strategic board

Pubblicazioni

Peer reviewed articles (1)

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Autori: Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Pubblicato in: Microscopy and Microanalysis, Numero 23/S1, 2017, Pagina/e 1466-1467, ISSN 1431-9276
Editore: Cambridge University Press
DOI: 10.1017/S1431927617007991