Metrology for future 3D-technologies

Project Information

METRO4-3D

Grant agreement ID: 688225

DOI 10.3030/688225

Project closed

EC signature date 25 November 2015

Start date 1 February 2016

End date 31 January 2019

Funded under

• INDUSTRIAL LEADERSHIP - Leadership in enabling and industrial technologies - Information and Communication Technologies (ICT)

Total cost € 3 349 813,75

EU contribution € 2 689 035,00

Coordinated by

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Deliverables

Documents, reports (5)

Report on organized training on the instrument
Report on dissemination activities
Summary of the access time on the instruments
Report 2 on dissemination activities

Report on dissemination activities

Report documenting the detailed technical specifications of the individual components

Websites, patent fillings, videos etc. (1)

Set-up of the website and strategic board

Publications

Peer reviewed articles (1)

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Author(s): Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Published in: Microscopy and Microanalysis, Issue 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
Publisher: Cambridge University Press
DOI: 10.1017/S1431927617007991