Skip to main content
European Commission logo
English English
CORDIS - EU research results
CORDIS
CORDIS Web 30th anniversary CORDIS Web 30th anniversary

Metrology for future 3D-technologies

Deliverables

Publications

Accretion Detection via Scanning Acoustic Microscopy in Microelectronic Components - Considering Symmetry Breaking Effects

Author(s): Eva Grünwald, René Hammer, Jördis Rose, Bernhard Sartory, Roland Brunner
Published in: Microscopy and Microanalysis, Issue 23/S1, 2017, Page(s) 1466-1467, ISSN 1431-9276
Publisher: Cambridge University Press
DOI: 10.1017/S1431927617007991

Searching for OpenAIRE data...

There was an error trying to search data from OpenAIRE

No results available