Ultrapure Water Technology - nanoparticle free water for the advanced nanoelectronics industry enabling further miniaturization of electronic devices

Project Information

ULTRAWAT

Grant agreement ID: 811908

DOI 10.3030/811908

Project closed

EC signature date 3 August 2018

Start date 1 July 2018

End date 31 January 2021

Funded under

• INDUSTRIAL LEADERSHIP - Innovation In SMEs

Total cost € 1 855 975,00

EU contribution € 1 299 182,50

Coordinated by

XZERO AB
Sweden

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Deliverables

Demonstrators, pilots, prototypes (3)

Demonstrator 400 l/h v.02 for evaluation at imec
Final full-scale demonstrator 400l/h

Final full-scale demonstrator 400l/h

Pilot 40 l/h v.01 for evaluation at imec

Open Research Data Pilot (1)

Open Research Data Pilot

Publications

Peer reviewed articles (1)

Experimental investigation and techno-economic analysis of tetramethylammonium hydroxide removal from wastewater in nano-electronics manufacturing via membrane distillation

Author(s): Imtisal-e- Noor, Jan Coenen, Andrew Martin, Olli Dahl, Miriam Åslin
Published in: Journal of Membrane Science, Issue 579, 2019, Page(s) 283-293, ISSN 0376-7388
Publisher: Elsevier BV
DOI: 10.1016/j.memsci.2019.02.067