Development of innovative ALD materials and tools for high density 3D integrated capacitors

Project Information

PICS

Grant agreement ID: 606149

Project closed

Start date 1 September 2013

End date 31 August 2015

Funded under

• Specific Programme "Capacities": Research for the benefit of SMEs

Total cost € 1 423 457,00

EU contribution € 1 067 000,00

Coordinated by

MURATA INTEGRATED PASSIVE SOLUTIONS
France